ENVIRONMENT. TECHNOLOGY. RESOURCES
15th International Scientific and Practical Conference. June 27-28, 2024, ''Vasil Levski'' National Military University, Veliko Tarnovo, Bulgaria

Uzunov, Ivan, Central Laboratory of Applied Physics, Bulgarian Academy of Sciences, Bulgaria

• Environment. Technology. Resources. 13th International Scientific and Practical Conference - ENGINEERING SCIENCES AND PRODUCTION TECHNOLOGIES
  GAS DISTRIBUTION SYSTEM FOR OPTIMIZATION OF THE TECHNOLOGICAL PROCESS OF COATING IN AN UNBALANCED MAGNETRON SPUTTERING INSTALLATION
  Abstract